Daisuke Saito

Visiting Scholar from Sony Corporation, Japan


Design and Fabrication of Micro Rate Integrated Gyroscope (MRIG)


Daisuke received his B.Sc. and M.Sc. degrees in Applied Physics from the University of Tsukuba in Japan. He is employed by Sony as an LED engineer, and has published 3 patents on compound semiconductors. He joined the MEMS Lab in 2013 as a visiting scholar to learn about MEMS sensor fabrication techniques.

Area of interest

Design, Fabrication and Characterization of Microelectromechanical Systems (MEMS)
MEMS sensors



  • Saito, Daisuke; Yang, Chen; Heidari, Amir; Najar, Hadi; Lin, Liwei; Horsley, David A., “Batch-fabricated high Q-factor microcrystalline diamond cylindrical resonator,” Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on , vol., no., pp.801,804, 18-22 Jan. 2015
    doi: 10.1109/MEMSYS.2015.7051080

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