10 MHz Optical Phased Array Metrology and Control

Very fast optical beam steering and wave front correction can be achieved by employing phased arrays of lightweight High Contrast Grating (HCG) MEMS mirror etalons. The etalons provide a large phase shift for a small displacement, 100x more than traditional reflective mirror elements. Operating such etalon arrays requires exquisite control of the MEMS mirror displacements. Our aim is to use in-situ stroboscopic interferometric imaging of the etalons to ensure phase accuracy and combat long term-drift, while employing feed-forward electrical input shaping to achieve fast settling time and precise phase tracking in a power-efficient way.


  • Mischa Megens


  • B.-W. Yoo, M. Megens, T. Chan, T. Sun, W. Yang, C. J. Chang-Hasnain, D. A. Horsley, and M. C. Wu, “Optical phased array using high contrast gratings for two dimensional beamforming and beamsteering,” Optics Express, vol. 21, no. 10, p. 12238, May 2013.
    doi: 10.1364/OE.21.012238
  • T. K. Chan, M. Megens, B.-W. Yoo, J. Wyras, C. J. Chang-Hasnain, M. C. Wu, and D. A. Horsley, “Optical beamsteering using an 8 × 8 MEMS phased array with closed-loop interferometric phase control,” Opt. Express, vol. 21, no. 3, pp. 2807–2815, Feb. 2013.
    doi: 10.1364/OE.21.002807

Comments are closed.