3-Axis MEMS Gyroscope

The goal of the project is to design the resonator and electronics for a single structure 3-Axis MEMS vibratory rate gyroscope. The mechanical structure of the device will be designed to have the capability of 3-Axis sensing performance. Low-power CMOS electronics will be designed to meet the requirements for consumer electronics.



  • Sonmezoglu, S.; Taheri-Tehrani, P.; Valzasina, C.; Falorni, L.G.; Zerbini, S.; Nitzan, S.; Horsley, D.A., “Single-Structure Micromachined Three-Axis Gyroscope With Reduced Drive-Force Coupling,” in Electron Device Letters, IEEE , vol.36, no.9, pp.953-956, Sept. 2015
    doi: 10.1109/LED.2015.2454511

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