Conference Proceedings

Publications can be downloaded/viewed from the BSAC publications database: Here

  1. Lu, Yipeng; Rozen, Ofer; Tang, Hao-Yen; Smith, Gabriel L.; Fung, Stephanie; Boser, Bernhard E.; Polcawich, Ronald G.; Horsley, David A., “Broadband piezoelectric micromachined ultrasonic transducers based on dual resonance modes,” Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on , vol., no., pp.146,149, 18-22 Jan. 2015
    doi: 10.1109/MEMSYS.2015.7050907
  2. Lu, Yipeng; Tang, Hao-Yen; Fung, Stephanie; Boser, Bernhard E.; Horsley, David A., “Short-range and high-resolution ultrasound imaging using an 8 MHz Aluminum Nitride PMUT array,” Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on , vol., no., pp.140,143, 18-22 Jan. 2015
    doi: 10.1109/MEMSYS.2015.7050905
  3. Saito, Daisuke; Yang, Chen; Heidari, Amir; Najar, Hadi; Lin, Liwei; Horsley, David A., “Batch-fabricated high Q-factor microcrystalline diamond cylindrical resonator,” Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on , vol., no., pp.801,804, 18-22 Jan. 2015
    doi: 10.1109/MEMSYS.2015.7051080
  4. Rozen, Ofer; Block, Scott.T.; Shelton, Stefon E.; Przybyla, Richard J.; Horsley, David A., “Air-coupled aluminum nitride piezoelectric micromachined ultrasonic transducers at 0.3 MHz TO 0.9 MHz,” Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on , vol., no., pp.921,924, 18-22 Jan. 2015
    doi: 10.1109/MEMSYS.2015.7051110
  5. Lu, Y., Shelton S.E., and Horsley D.A., “High Frequency and High Fill Factor Piezoelectric Micromachined Ultrasonic Transducers Based on Cavity SOI Wafers”, Hilton Head 2014 Solid-State Sensors, Actuators & Microsystems Workshop, Hilton Head Island
  6. Rozen, O., Shelton S.E., Guedes A., and Horsley D.A., “Variable Thickness Diaphragm for a Stress Insensitive Wideband Piezoelectric Micromachined Ultrasonic Transducer”, Hilton Head 2014 Solid-State Sensors, Actuators & Microsystems Workshop, Hilton Head Island
  7. M. Li, S. Sonmezoglu, E.J. Ng, V.A. Hong, C.H. Ahn, Y. Yang, T.W. Kenny, and D.A. Horsley, “Lorentz force magnetometer with quadrature frequency modulation,” Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2014, pp. 52-55, Jun 2014.
  8. Taheri-Tehrani, P., T. Su, A. Heidari, G. Jaramillo, C. Yang, S. Akhbari, H. Najar et al. “Micro-scale diamond hemispherical resonator gyroscope”, Hilton Head 2014 Solid-State Sensors, Actuators & Microsystems Workshop, Hilton Head Island, pp. 289-292. 2014.
  9. Li, M.; Rouf, V.T.; Sonmezoglu, S.; Horsley, D.A, “Magnetic sensors based on micromechanical oscillators,” Frequency Control Symposium (FCS), 2014 IEEE International , vol., no., pp.1,3, 19-22 May 2014
    doi: 10.1109/FCS.2014.6859914
  10. Najar, H.; Thron, A; Yang, C.; Fung, S.; van Benthem, K.; Lin, L.; Horsley, D.A, “Increased thermal conductivity polycrystalline diamond for low-dissipation micromechanical resonators,” Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on , vol., no., pp.628,631, 26-30 Jan. 2014
    doi: 10.1109/MEMSYS.2014.6765719
  11. Nitzan, S.; Su, T.-H.; Ahn, C.; Ng, E.; Hong, V.; Yang, Y.; Kenny, T.; Horsley, D.A, “Impact of gyroscope operation above the critical bifurcation threshold on scale factor and bias instability,” Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on , vol., no., pp.749,752, 26-30 Jan. 2014
    doi: 10.1109/MEMSYS.2014.6765749
  12. Yipeng Lu; Heidari, A; Shelton, S.; Guedes, A; Horsley, D.A, “High frequency piezoelectric micromachined ultrasonic transducer array for intravascular ultrasound imaging,” Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on , vol., no., pp.745,748, 26-30 Jan. 2014
    doi: 10.1109/MEMSYS.2014.6765748
  13. Li, M.; Ng, E.J.; Hong, V.A.; Ahn, C.H.;Yang Y.; Kenny, T.W.; Horsley, D.A., “Single-structure 3-axis lorentz force magnetometer with sub-30 nT/√HZ resolution,” Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on , vol., no., pp.80,83, 26-30 Jan. 2014
  14. Shelton S.E.,Rozen, O., Guedes A., Przybyla, R., Boser, B., Horsley, D. A., “Improved acoustic coupling of air-coupled micromachined ultrasonic transducers”, Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference
    doi: 10.1109/MEMSYS.2014.6765750
  15. Mo Li; Ng, E.J.; Hong, V.A; Ahn, C.H.; Yushi Yang; Kenny, T.W.; Horsley, D.A, “Single-structure 3-axis lorentz force magnetometer with sub-30 nT/√HZ resolution,” Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on , vol., no., pp.80,83, 26-30 Jan. 2014
    doi: 10.1109/MEMSYS.2014.6765578
  16. Su, T.-H.; Nitzan, S.; Taheri-Tehrani, P.; Kline, M.; Boser, B.; Horsley, D.A, “MEMS disk resonator gyroscope with integrated analog front-end,” SENSORS, 2013 IEEE , vol., no., pp.1,4, 3-6 Nov. 2013
    doi: 10.1109/ICSENS.2013.6688164
  17. Heidari, A; Chan, M.-L.; Yang, H.-A; Jaramillo, G.; Taheri-Tehrani, P.; Fonda, P.; Najar, H.; Yamazaki, K.; Lin, L.; Horsley, D.A, “Micromachined polycrystalline diamond hemispherical shell resonators,” Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on, vol., no., pp.2415,2418, 16-20 June 2013
    doi: 10.1109/Transducers.2013.6627293
  18. Mo Li; Rouf, V.T.; Jaramillo, G.; Horsley, D.A, “MEMS Lorentz force magnetic sensor based on a balanced torsional resonator,” Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on , vol., no., pp.66,69, 16-20 June 2013
    doi: 10.1109/Transducers.2013.6626702
  19. Kline, M.H.; Yeh, Y.; Eminoglu, B.; Najar, H.; Daneman, M.; Horsley, D.A; Boser, B.E., “Quadrature FM gyroscope,” Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on , vol., no., pp.604,608, 20-24 Jan. 2013
    doi: 10.1109/MEMSYS.2013.6474314
  20. Nitzan, S.; Ahn, C.H.; Su, T.-H.; Li, M.; Ng, E.J.; Wang, S.; Yang, Z.M.; O’Brien, G.; Boser, B.E.; Kenny, T.W.; Horsley, D.A, “Epitaxially-encapsulated polysilicon disk resonator gyroscope,” Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on , vol., no., pp.625,628, 20-24 Jan. 2013
    doi: 10.1109/MEMSYS.2013.6474319
  21. Mo Li; Rouf, V.T.; Horsley, D.A, “Substrate effect in squeeze film damping of lateral oscillating microstructures,” Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on , vol., no., pp.393,396, 20-24 Jan. 2013
    doi: 10.1109/MEMSYS.2013.6474261
  22. Rouf, V.T.; Mo Li; Horsley, D.A, “Area-efficient three-axis micromechanical magnetic sensor,” Sensors, 2012 IEEE , vol., no., pp.1,4, 28-31 Oct. 2012
    doi: 10.1109/ICSENS.2012.6411324
  23. Najar, H.; Mei-Lin Chan; Jin Xie; Liwei Lin; Horsley, D.A, “Impact of doping and microstructure on quality factor of CVD diamond micromechanical resonators,” Frequency Control Symposium (FCS), 2012 IEEE International , vol., no., pp.1,5, 21-24 May 2012
    doi: 10.1109/FCS.2012.6243675
  24. M.L. Chan ,J. Xie, P. Fonda, H. Najar, K. Yamazaki, L. Lin and D.A. Horsley, “Micromachined Polycrystalline Diamond Hemispherical Shell Resonators”Hilton Head 2012 Solid-State Sensors, Actuators & Microsystems Workshop, Hilton Head Island, SC, Jun. 3-7, 2012.
  25. S.E. Shelton, A. A. Guedes, R.J. Przybyla, R. Krigel, B.E. Boser and D.A Horsley, “Aluminum nitride piezoelectric micromachined ultrasound transducer arrays”Hilton Head 2012 Solid-State Sensors, Actuators & Microsystems Workshop, Hilton Head Island, SC, Jun. 3-7, 2012.
  26. R.J. Przybyla, S.E. Shelton, A. Guedes, R. Krigel, D.A. Horsley and B.E. Boser, “In-air ultrasonic rangefinding and angle estimation using an array of AlN micromachined transducers” Hilton Head 2012 Solid-State Sensors, Actuators & Microsystems Workshop, Hilton Head Island, SC, Jun. 3-7, 2012.
  27. G. Jaramillo, M. Li, C. Buffa, F. Brechtel, D.A. Horsley, “Charged particle detection using a micromechanical electrometer,” Hilton Head 2012 Solid-State Sensors, Actuators & Microsystems Workshop, Hilton Head Island, SC, Jun. 3-7, 2012.
  28. Chan, M.L.; Fonda, P.; Reyes, C.; Xie, J.; Najar, H.; Lin, L.; Yamazaki, K.; Horsley, D.A.; , “Micromachining 3D hemispherical features in silicon via micro-EDM,”Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on , vol., no., pp.289-292, Jan. 29 2012-Feb. 2 2012
    doi: 10.1109/MEMSYS.2012.6170151
  29. Guedes, A.; Shelton, S.; Przybyla, R.; Izyumin, I.; Boser, B.; Horsley, D.A.; , “Aluminum nitride pMUT based on a flexurally-suspended membrane,” Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International , vol., no., pp.2062-2065, 5-9 June 2011
  30. Przybyla, R.; Flynn, A.; Jain, V.; Shelton, S.; Guedes, A.; Izyumin, I.; Horsley, D.; Boser, B.; , “A micromechanical ultrasonic distance sensor with >1 meter range,”Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International , vol., no., pp.2070-2073, 5-9 June 2011
  31. M.-L. Chan, B. Yoxall, H. Park, Z. Kang, I. Izyumin, J. Chou, M. Megens, M.C. Wu, B.E. Boser, and D.A. Horsley, “Low friction liquid bearing MEMS micromotor,”Proc. IEEE MEMS, Jan. 23-27, 2011.
  32. M.J. Thompson, M. Li, and D.A. Horsley, “Low power 3-axis Lorentz force navigation magnetometer,” Proc. IEEE MEMS, Jan. 23-27, 2011.
  33. G. Langfelder, A. Tocchio, M.J. Thompson, G. Jaramillo, and D.A. Horsley, “Assessing micromechanical sensor characteristics via optical and electrical metrology,” Proc. IEEE Sensors 2010, Waikoloa, HI, Nov. 1-4, 2010.
  34. R. Przybyla, S. Shelton, A. Guedes, I. Izyumin, M. Kline, D. Horsley, and B. Boser, “An ultrasonic rangefinder based on an AlN piezoelectric micromachined ultrasound transducer,” Proc. IEEE Sensors 2010, Waikoloa, HI, Nov. 1-4, 2010.
  35. J.C. Lo, R.J. Anderson, D.A Horsley, and J.L. Skinner, “Fabrication of large arrays of ordered 3D nanocups for plasmonic applications,” to appear, Proc. 54th Int. Conf. on Electron, Ion, and Photon Beam Technology and Nanofabrication, Anchorage, AK June 1-4, 2010.
  36. M.J. Thompson and D.A. Horsley, “Lorentz force MEMS magnetometer,”Proceedings of the 2010 Workshop on Solid-State Sensors and Actuators, Hilton Head Island, SC, June 2010, pp. 44-48.
  37. J. Kotovksy, A. Tooker, and D.A. Horsley, “Thin silicon MEMS contact-stress sensor,” to appear, Proceedings of the 2010 Workshop on Solid-State Sensors and Actuators, Hilton Head Island, SC, June 2010, pp.254-257.
  38. J. Chou, K. Yu, D. Horsley, M. Tan, S.-Y. Wang, M. Wu, “Characterization of a MEMS-based optical system for free-space board-to-board optical interconnects,” Proc. 2010 Optical Fiber Comm. Conf., San Diego CA, March 21-25, 2010.
  39. G. Jaramillo, M.L. Chan, A. Guedes, D.A. Horsley, “Fabrication of micromechanically-modulated MgO magnetic tunnel junction sensors,” Proc. 23rd IEEE Intl. Conf. on Micro Electromechanical Systems, Hong Kong, Jan. 24-28, 2010, pp. 667-670.
  40. J. Chou, K. Yu, T. Bakhishev, D. Horsley, R. Walmsley, S. Mathai, M. Tan, S.Y. Wang, V. Subramanian, M. Wu, “Rotational optical alignment for array based free space board-to-board optical interconnect with zero power hold,” Proc. 23rd IEEE Intl. Conf. on Micro Electromechanical Systems, Hong Kong, Jan. 24-28, 2010, pp. 807-810.
  41. S. Shelton, M.-L. Chan, H. Park, B.E. Boser, I. Izyumin, R. Przybyla, T. Frey, M. Judy, K. Nunan, F. Sammoura, K. Yang, and D.A. Horsley, “CMOS-compatible AlN piezoelectric micromachined ultrasonic transducers,” Proc. 2009 IEEE Ultrasonics Symposium, Rome, Italy, Sept. 2009.
  42. M.J. Thompson and D.A. Horsley, “Resonant MEMS magnetometer with capacitive read-out,” Proc. IEEE Sensors 2009, Christchurch, NZ, Oct. 2009, pp. 992-995.
  43. M.J. Thompson and D.A. Horsley, “Parametrically-amplified MEMS magnetometer,” Proc.15th Int. Conf. Solid-State Sensors Actuators & Microsystems (Transducers 2009), Denver, CO, pp. 1194-1197, 2009.
  44. J.B. Chou, K. Yu, D.A. Horsley, S. Matthai, B. Yoxall, M. Tan, S.Y. Wang, and M.C. Wu, “Electrothermally actuated free space board to board optical interconnect with zero power hold,” Proc. 15th Int. Conf. Solid-State Sensors Actuators & Microsystems (Transducers 2009), Denver, CO, pp. 2202-2205, 2009.
  45. H.K. Park and D.A. Horsley, “MEMS Deformable Mirrors for Adaptive Optics Using Single Crystal PMN-PT,” IEEE LEOS Int. Conf. on Optical MEMS and Nanophotonics, Aug. 2008.
  46. J.B. Chou, K. Yu, D.A. Horsley, S. Mathai, B. Yoxall, M. Tan, S.Y. Wang, and M.C. Wu, “Rugged Board-to-Board Optical Interconnect with Closed-Loop Microlens Scanner,” Proceedings of the 2008 Workshop on Solid-State Sensors and Actuators, Hilton Head Island, SC, June 2008.
  47. J.L. Skinner, A.A. Talin, and D.A. Horsley, “Light modulation with a nano-patterned diffraction grating and MEMS pixel” Proc. 52nd Int. Conf. on Electron, Ion, and Photon Beam Technology and Nanofabrication, June 2008.
  48. M.L. Chan, G.M. Jaramillo, A.J. Son, K. Hristova, and D.A. Horsley, “Detection of Magnetically Labelled DNA Microarrays Using a Scanning Magnetic Tunnel Junction Sensor,” Proceedings of the 7th International Conference on Scientific and Clinical Applications of Magnetic Carriers, 21-24 May 2008.
  49. B.Y. Ku and D.A. Horsley, “A Microfluidic Device for the Detection of Magnetorelaxation in Biologically-Functionalized Ferrofluids,” Proceedings of the 7th International Conference on Scientific and Clinical Applications of Magnetic Carriers, 21-24 May 2008.
  50. N.J. Guilar, P.J. Hurst, R. Amirtharajah, D.L. Margolis, and D. Horsley, “Interface circuits for multiphase piezoelectric energy harvesters,” Proc. IEEE Applied Power Electronics Conference and Exposition, Austin, TX, 24-48 Feb. 2008, pp. 639-644.
  51. J.L. Skinner, A.A. Talin, and D.A. Horsley, Optical Modulation with Nanohole Gratings Made by Nanoimprint Lithography,” in Proceedings IEEE LEOS Annual Meeting, 21-25 Oct. 2007, pp. 711-712.
  52. B.Y. Ku and D.A. Horsley, “A Ferrofluid Immunoassay Based on Magnetic Field-Induced Birefringence,” IEEE Sensors 2007, Oct. 28-31, 2007, pp. 1089 – 1092.
  53. G.M. Jaramillo, M.L. Chan, and D.A. Horsley, “Integration of MEMS Actuators with Magnetic Tunnel Junctions,” IEEE Sensors 2007, Oct. 28-31, 2007, pp.1380-1383.
  54. J. Provine, R. Kant, D.A. Horsley, and R.T. Howe, “Effect of a Vertical Stack of Aligned Subwavelength Metal Hole Arrays on Extraordinary Transmission Spectra,” Proceedings of the IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, Hualien, Taiwan, August 12-16, 2007, pp. 117 – 118.
  55. M.L. Chan, G.M. Jaramillo, and D.A. Horsley, “Scanning Magnetic Tunnel Junction Sensor for the Detection of Magnetically Labeled DNA Microarray,”Proceedings of the 14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’07), Lyon, France, June 2007, pp. 95-98.
  56. J.R. Zayas, D.P. Roach, M.A. Rumsey, W.R. Allan, and D.A. Horsley, “Low-cost fiber Bragg grating interrogation system for in situ assessment of structures,”Proc. SPIE, Vol. 6529, 10 April 2007.
  57. M.L. Chan, G.M. Jaramillo, and D.A. Horsley, “Novel Magnetic Micro-Tweezers leveraging on Magnetic Hard- Disk Drive Technology,” Proceedings of the 2006 ASME International Mechanical Engineering Congress and Exposition, Chicago, IL, Nov. 2006.
  58. H.K. Park and D.A. Horsley, “Fabrication and Characterization of MEMS Deformable Mirrors for Adaptive Optics,” Proceedings of the 2006 ASME International Mechanical Engineering Congress and Exposition, Chicago, IL, Nov. 2006.
  59. J.L. Skinner, L.L. Hunter, A.A. Talin, and D.A. Horsley, “Nanoimprint Patterned Aluminum Photonic Grating for Refractive Index Measurement,” Proceedings of the IEEE/LEOS Conference on Optical MEMS, Big Sky, MT, Aug. 2006.
  60. A.S. Kane, D. Hertzog, P. Baumgartel, J. Lengefeld, D. Horsley, B. Schuler, O. Bakajin, “Microfluidic Mixers for the Investigation of Protein Folding Using Synchrotron Radiation Circular Dichroism Spectroscopy”, Proceedings of the 2006 Workshop on Solid-State Sensors and Actuators, Hilton Head Island, SC, June 2006. (peer reviewed proceedings, 25% acceptance rate).
  61. J.L. Skinner, D.A. Horsley, L.L. Hunter, and A.A. Talin, “Nanopatterned Optically Active Surfaces,” Nanomaterials for Defense Applications Symposium, Virginia Beach, VA, May 1-4, 2006.
  62. Logeeswaran V.J., M.S. Islam, M.L. Chan, D. A. Horsley, W. Wu, S.-Y. Wang, R.S. Williams, “Realization of 3D Isotropic Negative Index Materials Using Massively Parallel and Manufacturable Microfabrication and Micromachining Technology,” Proceedings of the Materials Research Society Spring Meeting,April 2006.
  63. J. Provine, J. Skinner, D. A. Horsley, “Subwavelength Metal Grating Tunable Filter,” Proceedings of the 19th IEEE Intl. Conf. on Micro Electromechanical Systems, Jan. 22-26, Istanbul, Turkey, 2006. (peer reviewed proceedings, 45% acceptance rate).
  64. B. Allan, D.A. Horsley, J. R. Zayas, “Development of an Embedded High Performance MEMS-based Fiber Bragg Grating Interrogation System for Wind Turbine Applications,” Proceedings of the ASME Wind Energy Symposium, Jan. 9-12, Reno, NV, 2006.
  65. D.A. Horsley, H. Park, C.-W. Chuang, S.P. Laut, J.S. Werner, “Optical Characterization of a Bimorph Deformable Mirror,” Proceedings of the 2005 ASME International Mechanical Engineering Congress and Exposition, Nov. 5-11, Orlando, FL, 2005.
  66. S. Laut, S. Jones, H. Park, D.A. Horsley, S. Olivier, J.S. Werner, “Bimorph Deformable Mirror: an Appropriate Wavefront Corrector for Retinal Imaging,”Proceedings of the SPIE, v. 6007, Oct. 2005.
  67. J. Provine, D.T. McCormick, D.A. Horsley, N.C. Tein, “Wavelength Routing with MEMS Switch and a Single AWG,” Proceedings of the SPIE, v. 6014, Oct. 2005.
  68. D.A. Horsley, J. Provine, J. Skinner, “Integration of Subwavelength Metal Gratings with MEMS Actuators,” Proceedings of the SPIE, v. 6008, Oct. 2005
  69. B.L. Chua, V.J. Logeeswaran, M.L. Chan, H.K. Park, D.A. Horsley, N.C. Tien, “An electrohydrodynamically driven microfabricated actuator for the study of miniature ion propulsion engine and electric wind devices,” Proc. 13th Intl. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers ’05), pp. 197-200, 2005.
  70. D.A. Horsley, H.K. Park, S.P. Laut, J.S. Werner, “Characterization for vision science applications of a bimorph deformable mirror using phase-shifting interferometry,” Proceedings of the SPIE, v. 5688, 133-144, Apr. 2005.
  71. J. Provine, D. Horsley, N. Tien, “MEMS-based non-dispersive IR gas detection system using a linear variable filter,” IEEE Conf. on Optical MEMS, Japan, Aug. 2004.
  72. D.A. Horsley, M.J. Daneman, M.R. Hart, K. Hogan, T. Beerling, B. Behin, M.-H. Kiang, “High Performance MEMS-Based 8×8-port Optical Switch,” Proc. 5thIEEE/LEOS Pacific Rim Conf. on Lasers and Electro-Optics (CLEO/Pacific Rim), p. 99, Dec. 2003.
  73. S. Hoen, Q. Bai, J.A. Harley, D.A. Horsley, F. Matta, T. Verhoeven, J. Williams, K.R. Williams, “A High Performance Dipole Surface Drive for Large Travel and Force,” 12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), pp. 344-347, June 2003.
  74. D.A. Horsley, P.G. Hartwell, R.G. Walmsley, J. Brandt, U. Yoon, and S. Hoen, “Multi-degree of Freedom Dynamic Characterization of Deep-Etched Silicon Suspensions,” Proc. 2000 Workshop on Solid-State Sensors and Actuators,Hilton Head, SC, pp.81-84, June 2000.
  75. N. Wongkomet, D.A. Horsley, B. Boser, “A Capacitive Position Sensing Circuit for Microactuators,” 12th European Conference on Solid-State Transducers (Eurosensors XII), Southampton, UK, Sept. 1998.
  76. D.A. Horsley, N. Wongkomet, R. A.P. Pisano, R. Horowitz, “Design and Feedback Control of Electrostatic Actuators for Magnetic Disk Drives,” Proc. 1998 Workshop on Solid-State Sensors and Actuators, Hilton Head, SC, pp.120-123, June 1998.
  77. D.A. Horsley, D. Hernandez, R. Horowitz, A.K. Packard, and A.P. Pisano, “Closed-Loop Control of a Microfabricated Actuator for Dual-Stage Hard Disk Drive Servo Systems,” Proc. 1998 American Control Conf., Philadelphia, PA, pp. 3028-3032, June 1998.
  78. S.K. Aggarwal, D.A. Horsley, R. Horowitz, and A.P. Pisano, “Microactuators for High Density Disk Drives,” Proc. 1997 American Control Conf., Albuquerque, NM, pp. 3979-3084, June 1997.
  79. A. Singh, D.A. Horsley, M.B. Cohn, A.P. Pisano, and R.T. Howe, “Batch transfer of Microstructures Using Flip-Chip Solder Bump Bonding,” Proc. 1997 Int. Conf. on Solid-State Sensors and Actuators (Transducers ’97), Chicago, IL, pp. 265-268, June 1997.
  80. D.A. Horsley, A. Singh, A.P. Pisano, R. Horowitz, “Angular Micropositioner for Disk Drives,” Proc. 1997 Conf. on Microelectromechanical Systems (MEMS ’97),Nagoya, Japan, pp. 454-459, February 1997.

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