Publications

Publications may also be downloaded/viewed from the BSAC publications database: Here

2018

Journals

  1. Taheri-Tehrani P., Challoner D. A.; Horsley, D. A., “Micromechanical Rate Integrating Gyroscope with Angle-Dependent Bias Compensation Using a Self-Precession Method,” IEEE Sensors Journal, vol.18, no.9 pp.3533-3543, May. 2018.
    doi: 10.1109/JSEN.2018.2810843
  2. Kusano, Y.; Wang, Q.; Luo, G-L.; Lu, Y.; Rudy, R.Q.; Polcawich, R.G.; Horsley, D.A., “Effects of DC Bias Tuning on Air-Coupled PZT Piezoelectric Micromachined Ultrasonic Transducers,” Journal of Microelectromechanical Systems, vol.27, no.2 pp.296-304, Feb. 2018.
    doi: 10.1109/JMEMS.2018.2797684

Conference Proceedings

  1. Luo, G-L.; Wang, Q.; Kusano, Y.; Horsley, D.A., “Immersion PMUTs Fabricated with a Low Thermal-Budget Surface Micromachining Process,” in 2018 IEEE International Ultrasonics Symposium (IUS), October 2018.
  2. Kusano, Y.; Luo, G-L.; Ishii, I.; Teshigahara, A.; Horsley, D.A., “36% Scandium Aluminum Nitride Piezoelectric Micromachined Ultrasonic Transducers,” in 2018 IEEE International Ultrasonics Symposium (IUS), October 2018.
  3. Jiang, X.; Luo, G-L.; Horsley, D.A., “Improving  PMUT Transmit Performance via Sub-micron Thickness Scaling,” in 2018 IEEE International Ultrasonics Symposium (IUS), October 2018.
  4. Wang, Q.; Luo, G-L.; Kusano, Y.; Horsley, D.A., “Surface Micromachined  Piezoelectric Micromachined Ultrasonic Transducers with High Fill-factor and High Performance,” in Hilton Head 2018 Solid-State Sensors, Actuators and Microsystems Workshop on, June 2018.
  5. Taheri-Tehrani, P., Defoort, M.; Horsley D.A., “Exploiting Mutual Fractional Synchronization to Improve Amplitude and Frequency Stability in Micromechanical Oscillators,” in 2018 the IEEE International Frequency Control Symposium (IFCS), May 2018.
  6. Luo, G-L.; Wang, Q.; Kusano, Y.; Horsley, D.A., “Increased Output-Pressure PMUTs with a Sloped Profile Fabricated via Surface Micromachining,” in 2018 the IEEE International Frequency Control Symposium (IFCS), May 2018.

2017

Journals

  1. Jiang, X.; Lu, Y.; Tang, H.; Tsai, J.M.; Ng, E.J.; Daneman, M.J.; Boser, B.E.; Horsley, D.A., “Monolithic Ultrasonic Fingerprint Sensor,” Microsystems and Nanoengineering, vol.3, no.17059, pp.1-8, Nov. 2017.
    doi: 10.1038/micronano.2017.59
  2. Taheri-Tehrani, P.; Guerrieri, A.; Defoort, M.; Frangi, A.; Horsley, D.A., “Mutual 3:1 subharmonic synchronization in a micromachined silicon disk resonator,” Applied Physics Letters, vol.111, no.18, pp.183505, Nov. 2017.
    doi: 10.1063/1.4997195
  3. Taheri-Tehrani, P.; Defoort, M.; Horsley, D.A., “Synchronization of a micromechanical oscillator in different regimes of electromechanical nonlinearity,” Applied Physics Letters, vol.111, no.18, pp.183503, Oct. 2017.
    doi: 10.1063/1.4999323
  4. Wang, Q.; Lu, Y.; Mishin, S.; Oshmyansky, Y.; Horsley, D.A., “Design, Fabrication, and Characterization of Scandium Aluminum Nitride-Based Piezoelectric Micromachined Ultrasonic Transducers,” Journal of Microelectromechanical Systems, vol.26, no.5, pp.1132-1139, July. 2017.
    doi: 10.1109/JMEMS.2017.2712101
  5. Taheri-Tehrani, P.; Defoort, M.; Horsley, D.A., “Operation of a High Quality-Factor Gyroscope in Electromechanical Nonlinearities Regime,” Journal of Micromechanics and Microengineering, vol.27, no.7, pp., June. 2017.
    doi: 10.1088/1361-6439/aa73af
  6. Jiang, X.; Tang, H.; Lu, Y.; Ng, E.J.; Tsai, J.M.; Boser, B.E.; Horsley, D.A., “Ultrasonic Fingerprint Sensor With Transmit Beamforming Based on a PMUT Array Bonded to CMOS Circuitry,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol.64, no.9, pp.1401-1408, May. 2017.
    doi: 10.1109/TUFFC.2017.2703606
  7. Defoort, M.; Taheri-Tehrani, P.; Nitzan, S.; Horsley, D.A., “Impact of Synchronization in Micromechanical Gyroscopes,” Journal of Vibration and Acoustics, vol.134, no.4, pp.040906, May. 2017.
    doi: 10.1115/1.4036397
  8. Sonmezoglu, S.; Horsley, D. A., “Reducing Offset and Bias Instability in Lorentz Force Magnetic Sensors Through Bias Chopping,”Journal of Microelectromechanical Systems, vol.26, no.1, pp.169-178, Feb. 2017.
    doi: 10.1109/JMEMS.2016.2626259

Conference Proceedings

  1. Wang, Q.; Horsley D.A., “Using a mutual acoustic impedance model to improve the time domain response of PMUT arrays,” in Ultrasonics Symposium (IUS), 2017 IEEE International, pp.1-4, 6-9 Sept. 2017.
  2. Sonmezoglu, S.; Flader, I.B.; Chen. Y.; Shin, D.D.; Kenny, T.W.; Horsley, D.A., “Dual-Resonator MEMS Magnetic Sensor with Differential Amplitude Modulation,” in 2017 the 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 18-22 June 2017.
  3. Sonmezoglu, S.; Segovia-Fernandez, J.; Block. S.T.; Kusano, Y.; Tsai, J.M.; Amirtharajah. R.; Horsley, D.A., “Passive Signal Amplification via Series-Piezoelectric Read-Out,” in 2017 the 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 18-22 June 2017.
  4. Kusano, Y.; Segovia-Fernandez, J.; Sonmezoglu, S.; Amirtharajah. R.; Horsley, D.A., “Frequency Selective MEMS Microphone Based on a Bioinspired Spiral-Shaped Acoustic Resonator,” in 2017 the 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 18-22 June 2017.
  5. Segovia-Fernandez, J.; Sonmezoglu, S.; Block, S.T.; Kusano, Y.; Tsai, J.M.; Amirtharajah, R.; Horsley, D.A., “Monolithic Piezoelectric Aluminum Nitride MEMS-CMOS Microphone,” in 2017 the 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 18-22 June 2017.
  6. Luo, G-L.; Fung, S.; Wang, Q.; Kusano, Y.; Lasiter, J.; Kidwell, D.; Horsley, D.A., “High Fill Factor Piezoelectric Micromachined Ultrasonic Transducers on Transparent Substrates,” in 2017 the 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 18-22 June 2017.
  7. Sonmezoglu, S.; Flader, I.B.; Chen. Y.; Shin, D.D.; Kenny, T.W.; Horsley, D.A., “Dual-Resonator MEMS Lorentz Force Magnetometer Based on Differential Frequency Modulation,” in Inertial Sensors and Systems (INERTIAL), 2017 IEEE International Symposium on, pp.160-163, 27-30 March 2017.
  8. Wang, Q.; Kusano, Y.; Horsley D.A., “Coupled piezoelectric micromachined ultrasonic transducers with improved pulse-echo performance,” in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), pp.151-154, 22 – 26 Jan. 2017.
  9. Jiang, X.; Tang, H.Y.; Lu, Y.; Ng, E.J.; Tsai, J.M.; Daneman, M.J.; Boser,B.E.; Horsley, D.A., “Inter-Element Coupling Effects in Pulse-Echo Ultrasonic Fingerprint Sensors,” in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), pp.1192-1195, 22 – 26 Jan. 2017.
  10. Kusano, Y.; Wang, Q.; Rudy, R.Q.; Polcawich, R.G.; Horsley, D.A., “Wideband Air-Coupled PZT Piezoelectric Micromachined Ultrasonic Transducer Through DC Bias Tuning,” in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), pp.1204-1207, 22 – 26 Jan. 2017.
  11. Taheri-Tehrani P.; Defoort, M. ; Chen, Y.; Flader, I.; Ng, E.J.; Shin, D.D.; Kenny, T.W.; Horsley, D.A., “Epitaxially-Encapsulated Quad Mass Resonator with Shaped Comb Fingers for Frequency Tuning,” in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), pp.1111-1114, 22 – 26 Jan. 2017.

2016

Journals

  1.  Sonmezoglu, S., Horsley, D.A., “Reducing Offset and Bias Instability in Lorentz Force Magnetic Sensors Through Bias Chopping,” Journal of Microelectromechanical Systems, vol.PP, no.99, pp.1-10, Nov. 2016.
    doi: 10.1109/JMEMS.2016.2626259
  2.  Defoort, M., Taheri-Terhani, P., Horsley, D.A., “Exploiting nonlinear amplitude-frequency dependence for temperature compensation in silicon micromechanical resonators,” Applied Physics Letters, vol. 109, no. 15, p. , Jun. 2015.
    doi: 10.1063/1.4964832
  3. Nitzan, S.,Taheri-Tehrani, P., Defoort, M., Sonmezoglu, S., Horsley, D.A., “Countering the Effects of Nonlinearity in Rate-Integrating Gyroscopes,” IEEE Sensors Journal, vol. 16, no. 10, p.3556-3563 , Feb. 2015.
    doi: 10.1109/JSEN.2016.2533480

Conference Proceedings

  1. Wang, Q.; Lu, Y.; Fung, S.; Jiang, X.; Mishin, S.; Oshmyansky, Y.; Horsley, D.A., “Scandium-Doped Aluminum Nitride-Based Piezoelectric Micromachined Ultrasound Transducers”, in Hilton Head 2016 Solid-State Sensors, Actuators and Microsystems Workshop on, pp. 436 – 439, 5 – 9 June, 2016.
  2. Defoort, M., Taheri-Terhani, P.; Nitzan, S.; Horsley, D.A., “Synchronization in Micromechanical Gyroscopes”, in Hilton Head 2016 Solid-State Sensors, Actuators and Microsystems Workshop on, pp. 84 – 87, 5 – 9 June, 2016.
  3. Taheri-Tehrani P.; Challoner D. A.; Izyumin, O.; Boser, B. E.; Horsley, D. A., “A New Electronic Feedback Compensation Method for Rate Integrating Gyroscopes,” in 2016 IEEE 29th International Symposium on Inertial Sensors and Systems, pp.1-4, 22 – 25 Feb, 2016.
    doi: 10.1109/ISISS.2016.7435532
  4. Taheri-Tehrani, P.; Kline, M.; Izyumin, I.; Eminoglu, B.; Yeh, Y.-C.; Yang, Y.; Chen, Y.; Flader, I.; Ng, E.J.; Kenny, T.W.; Boser, B.E.; Horsley, D.A., “Epitaxially-Encapsulated Quad Mass Gyroscope with Nonlinearity Compesation,” in 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), pp.966-969, 24 – 28 Jan, 2016.
    doi: 10.1109/MEMSYS.2016.7421793
  5. Jiang, X.; Tang, H.Y.; Lu, Y.; Li, X.; Tsai, J.M.; Ng, E.J.; Daneman, M.J.; Lim, M.; Assaderaghi, F.; Boser, B.E.; Horsley, D.A., “Monolithic 591× 438 DPI ultrasonic fingerprint sensor,” in 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), pp.107-110, 24 – 28 Jan, 2016.
    doi: 10.1109/MEMSYS.2016.7421569
  6. Sonmezoglu, S.; Horsley, D.A., “Off-Resonance Operation of a MEMS Lorentz Force Magnetometer with Improved Thermal Stability of the Scale Factor,” in 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), pp.103-106, 24 – 28 Jan, 2016.
    doi: 10.1109/MEMSYS.2016.7421568
  7. Rozen, O.; Block, S.T.; Mo, X.; Bland, W.; Hurst, P.; Tsai, J.M.; Daneman, M.; Amirtharajah, R.; Horsley, D.A., “Monolithic MEMS-CMOS Ultrasonic Rangefinder Based on Dual-Electrode PMUTs,” in 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), pp.115-118, 24 – 28 Jan, 2016.
    doi: 10.1109/MEMSYS.2016.7421571

2015

Journals

  1. Lu, Y.; Tang, H.; Fung, S.; Boser, B.E.; Horsley, D.A., “Pulse-Echo Ultrasound Imaging Using an AlN Piezoelectric Micromachined Ultrasonic Transducer Array With Transmit Beam-Forming,” Journal of Microelectromechanical Systems, vol.25, no.1, pp.179-187, Dec. 2015
    doi: 10.1109/JMEMS.2015.2503336
  2. Najar, H.; Yang, C.; Heidari, A.; Lin. L.; Horsley, D.A., “Quality factor in polycrystalline diamond micromechanical flexural resonators,” Journal of Microelectromechanical Systems, vol.24, no.6, pp.953-956, Oct. 2015
    doi: 10.1109/JMEMS.2015.2478802
  3. Sonmezoglu, S.; Taheri-Tehrani, P.; Valzasina, C.; Falorni, L.G.; Zerbini, S.; Nitzan, S.; Horsley, D.A., “Single-Structure Micromachined Three-Axis Gyroscope With Reduced Drive-Force Coupling,” in Electron Device Letters, IEEE, vol.36, no.9, pp.953-956, Sept. 2015
    doi: 10.1109/LED.2015.2454511
  4. V. Zega, S. Nitzan, M. Li, C. H. Ahn, E. Ng, V. Hong, Y. Yang, T. Kenny, A. Corigliano, and D. A. Horsley, “Predicting the closed-loop stability and oscillation amplitude of nonlinear parametrically amplified oscillators,” Applied Physics Letters, vol. 106, no. 23, p. 233111, Jun. 2015.
    doi: 10.1063/1.4922533
  5. Y. Lu, H. Tang, S. Fung, Q. Wang, J. M. Tsai, M. Daneman, B. E. Boser, and D. A. Horsley, “Ultrasonic fingerprint sensor using a piezoelectric micromachined ultrasonic transducer array integrated with complementary metal oxide semiconductor electronics,” Applied Physics Letters, vol. 106, no. 26, p. 263503, Jun. 2015.
    doi: 10.1063/1.4922915
  6. Y. Lu, H. Tang, Q. Wang, S. Fung, J. M. Tsai, M. Daneman, B. E. Boser, and D. A. Horsley, “Waveguide piezoelectric micromachined ultrasonic transducer array for short-range pulse-echo imaging,” Applied Physics Letters, vol. 106, no. 19, p. 193506, May 2015.
    doi: 10.1063/1.4921346
  7. S. H. Nitzan, V. Zega, M. Li, C. H. Ahn, A. Corigliano, T. W. Kenny, and D. A. Horsley, “Self-induced parametric amplification arising from nonlinear elastic coupling in a micromechanical resonating disk gyroscope,” Sci. Rep., vol. 5, Mar. 2015.
    doi: 10.1038/srep09036
  8. S. Sonmezoglu, M. Li, and D. A. Horsley, “Force-rebalanced Lorentz force magnetometer based on a micromachined oscillator,” Applied Physics Letters, vol. 106, no. 9, p. 093504, Mar. 2015.
    doi: 10.1063/1.4914177
  9. Lu, Y.; Horsley, D.A., “Modeling, Fabrication, and Characterization of Piezoelectric Micromachined Ultrasonic Transducer Arrays Based on Cavity SOI Wafers,” Microelectromechanical Systems, Journal of , vol.PP, no.99, pp.1,1, Jan. 2015.
    doi: 10.1109/JMEMS.2014.2387154
  10. Mo Li; Nitzan, S.; Horsley, D.A., “Frequency-Modulated Lorentz Force Magnetometer With Enhanced Sensitivity via Mechanical Amplification,” Electron Device Letters, IEEE , vol.36, no.1, pp.62,64, Jan. 2015.
    doi: 10.1109/LED.2014.2372617

Conference Proceedings

  1. Fung, Stephanie; Lu, Yipeng; Tang, Hao-Yen; Tsai, Julius M.; Daneman, Michael; Boser, Bernhard E.; Horsley, David A., “Theory and experimental analysis of scratch resistant coating for ultrasonic fingerprint sensors,” in Ultrasonics Symposium (IUS), 2015 IEEE International, vol., no., pp.1-4, 21-24 Oct. 2015
    doi: 10.1109/ULTSYM.2015.0150
  2. Lu, Yipeng; Wang, Qi; Horsley, David A., “Piezoelectric micromachined ultrasonic transducers with increased coupling coefficient via series transduction,” in Ultrasonics Symposium (IUS), 2015 IEEE International, vol., no., pp.1-4, 21-24 Oct. 2015
    doi: 10.1109/ULTSYM.2015.0093
  3. Taheri-Tehrani, P.; Izyumin, O.; Izyumin, I.; Ahn, C.H.; Ng, E.J.; Hong, V.A.; Yang, Y.; Kenny, T.W.; Boser, B.E.; Horsley, D.A., “Disk resonator gyroscope with whole-angle mode operation,” in Inertial Sensors and Systems (ISISS), 2015 IEEE International Symposium on , vol., no., pp.1-4, 23-26 March 2015
    doi: 10.1109/ISISS.2015.7102360
  4. Lu, Yipeng; Rozen, Ofer; Tang, Hao-Yen; Smith, Gabriel L.; Fung, Stephanie; Boser, Bernhard E.; Polcawich, Ronald G.; Horsley, David A., “Broadband piezoelectric micromachined ultrasonic transducers based on dual resonance modes,” Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on , vol., no., pp.146,149, 18-22 Jan. 2015
    doi: 10.1109/MEMSYS.2015.7050907
  5. Lu, Yipeng; Tang, Hao-Yen; Fung, Stephanie; Boser, Bernhard E.; Horsley, David A., “Short-range and high-resolution ultrasound imaging using an 8 MHz Aluminum Nitride PMUT array,” Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on , vol., no., pp.140,143, 18-22 Jan. 2015
    doi: 10.1109/MEMSYS.2015.7050905
  6. Saito, Daisuke; Yang, Chen; Heidari, Amir; Najar, Hadi; Lin, Liwei; Horsley, David A., “Batch-fabricated high Q-factor microcrystalline diamond cylindrical resonator,” Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on , vol., no., pp.801,804, 18-22 Jan. 2015
    doi: 10.1109/MEMSYS.2015.7051080
  7. Rozen, Ofer; Block, Scott.T.; Shelton, Stefon E.; Przybyla, Richard J.; Horsley, David A., “Air-coupled aluminum nitride piezoelectric micromachined ultrasonic transducers at 0.3 MHz TO 0.9 MHz,” Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on , vol., no., pp.921,924, 18-22 Jan. 2015
    doi: 10.1109/MEMSYS.2015.7051110

2014

Journals

  1. Lu, Y.; Heidari, A.; Horsley, D.A., “A High Fill-Factor Annular Array of High Frequency Piezoelectric Micromachined Ultrasonic Transducers,” Microelectromechanical Systems, Journal of , vol.PP, no.99, pp.1,1
    doi: 10.1109/JMEMS.2014.2358991
  2. Najar, H.;Chan, M.-L.; Yang, H.-S.; Lin, L.; Cahill, D.G; Horsley, D.A., “High quality factor nanocrystalline diamond micromechanical resonators limited by thermoelastic damping”, Applied Physics Letters, 104, 151903 (2014)
    doi: 10.1063/1.4871803
  3. Su, Tsang-Hung; Nitzan, S.H.; Taheri-Tehrani, P.; Kline, M.H.; Boser, B.E.; Horsley, D.A, “Silicon MEMS Disk Resonator Gyroscope with an Integrated CMOS Analog Front-End,” Sensors Journal, IEEE , vol.PP, no.99, pp.1,1
    doi: 10.1109/JSEN.2014.2335735
  4. Li, M.; Horsley, D.A, “Offset Suppression in a Micromachined Lorentz Force Magnetic Sensor by Current Chopping,” Microelectromechanical Systems, Journal of , vol.PP, no.99, pp.1,1
    doi: 10.1109/JMEMS.2014.2316452
  5. Li, M.; Sonmezoglu, S.; Horsley, D.A, “Extended Bandwidth Lorentz Force Magnetometer Based on Quadrature Frequency Modulation,” Microelectromechanical Systems, Journal of , vol.PP, no.99, pp.1,1
    doi: 10.1109/JMEMS.2014.2330055

Conference Proceedings

  1. Lu, Y., Shelton S.E., and Horsley D.A., “High Frequency and High Fill Factor Piezoelectric Micromachined Ultrasonic Transducers Based on Cavity SOI Wafers”, Hilton Head 2014 Solid-State Sensors, Actuators & Microsystems Workshop, Hilton Head Island
  2. Rozen, O., Shelton S.E., Guedes A., and Horsley D.A., “Variable Thickness Diaphragm for a Stress Insensitive Wideband Piezoelectric Micromachined Ultrasonic Transducer”, Hilton Head 2014 Solid-State Sensors, Actuators & Microsystems Workshop, Hilton Head Island
  3. Taheri-Tehrani, P., T. Su, A. Heidari, G. Jaramillo, C. Yang, S. Akhbari, H. Najar et al. “Micro-scale diamond hemispherical resonator gyroscope”, Hilton Head 2014 Solid-State Sensors, Actuators & Microsystems Workshop, Hilton Head Island, pp. 289-292. 2014.
  4. M. Li, S. Sonmezoglu, E.J. Ng, V.A. Hong, C.H. Ahn, Y. Yang, T.W. Kenny, and D.A. Horsley, “Lorentz force magnetometer with quadrature frequency modulation,” Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2014, pp. 52-55, Jun 2014.
  5. Li, M.; Rouf, V.T.; Sonmezoglu, S.; Horsley, D.A, “Magnetic sensors based on micromechanical oscillators,” Frequency Control Symposium (FCS), 2014 IEEE International , vol., no., pp.1,3, 19-22 May 2014
    doi: 10.1109/FCS.2014.6859914
  6. Najar, H.; Thron, A; Yang, C.; Fung, S.; van Benthem, K.; Lin, L.; Horsley, D.A, “Increased thermal conductivity polycrystalline diamond for low-dissipation micromechanical resonators,” Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on , vol., no., pp.628,631, 26-30 Jan. 2014
    doi: 10.1109/MEMSYS.2014.6765719
  7. Nitzan, S.; Su, T.-H.; Ahn, C.; Ng, E.; Hong, V.; Yang, Y.; Kenny, T.; Horsley, D.A, “Impact of gyroscope operation above the critical bifurcation threshold on scale factor and bias instability,” Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on , vol., no., pp.749,752, 26-30 Jan. 2014
    doi: 10.1109/MEMSYS.2014.6765749
  8. Yipeng Lu; Heidari, A; Shelton, S.; Guedes, A; Horsley, D.A, “High frequency piezoelectric micromachined ultrasonic transducer array for intravascular ultrasound imaging,” Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on , vol., no., pp.745,748, 26-30 Jan. 2014
    doi: 10.1109/MEMSYS.2014.6765748
  9. Li, M.; Ng, E.J.; Hong, V.A.; Ahn, C.H.;Yang Y.; Kenny, T.W.; Horsley, D.A., “Single-structure 3-axis lorentz force magnetometer with sub-30 nT/√HZ resolution,” Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on , vol., no., pp.80,83, 26-30 Jan. 2014
  10. Shelton S.E.,Rozen, O., Guedes A., Przybyla, R., Boser, B., Horsley, D. A., “Improved acoustic coupling of air-coupled micromachined ultrasonic transducers”, Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference
    doi: 10.1109/MEMSYS.2014.6765750
  11. Mo Li; Ng, E.J.; Hong, V.A; Ahn, C.H.; Yushi Yang; Kenny, T.W.; Horsley, D.A, “Single-structure 3-axis lorentz force magnetometer with sub-30 nT/√HZ resolution,” Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on , vol., no., pp.80,83, 26-30 Jan. 2014
    doi: 10.1109/MEMSYS.2014.6765578

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