The MEMS Laboratory (MEMS Lab) at UC Davis is home to Professor David Horsley‘s research group in the Department of Mechanical and Aerospace Engineering. Our research focus is on Micro-Electromechanical Systems (MEMS) and Nanostructures. Current work from our group explore topics such as: Lorentz force magnetic sensing (magnetometer/compass), gyroscopes, materials for high-Q resonators (Diamond) and piezoelectric micromachined ultrasound transducers (PMUT). Previous research activities include optical nanostructures and optical MEMS, novel sensor applications, and microfluidic devices.
University of California, Davis
One Shields Avenue, 1072 Bainer Hall
Davis, CA 95616
The UC Davis MEMS Lab is a 1000+ square-foot facility outfitted with metrology equipment for the characterization of MEMS structure and device performance:
- Two laser Doppler vibrometers (LDV) and a Planar Motion Analyzer (PMA) — Polytec
- Two wafer probing stations and Mitutoyo microscopes
- Vacuum probe station — MMR Technologies Inc.
- Ultrasound Acoustic Testing: Needle hydrophone — Precision Acoustics
- 3-axis scanning stage for automated ultrasound acoustic measurements
- Magnetic testing equipment includes a BH Looper, gaussmeters, and Helmholtz coils
- Spectrum and Network analyzers — Agilent E5061B with impedance analysis option, HP4195A and SR785
- Low-noise amplifiers — FEMTO
- Lock-in amplifiers — Zurich Intruments H2LI, SR810, Signal Recovery 5110
- LRC Meter — QuadTech 7600
- Bipolar power amplifiers — Kepco
- Shaker — Endevco 54501
- Optical spectrometer — Ando AQ6317
- Electrochemical Analyzer, picoamp booster and Faraday cage — CH Intruments Inc.
Lab Affiliations and Collaborations
The MEMS Lab is a member of BSAC which enables us to perform collaborative research and partner up with industrial members.
- Berkeley Sensors & Actuator Center (BSAC)
- Marvell Nanofabrication Laboratory (NanoLab)
- Center for Nano-MicroManufacturing (CNMM/CNM2)
- The Swarm Lab at UC Berkeley (SWARM Lab)
- Micro Structures & Sensors Lab at Stanford