Micro Rate-Integrating Gyroscope

The goal of this project is to realize a micro rate-integrating gyroscope that produces an output signal proportional to rotation angle rather than rotation rate. If successful, this device would eliminate the need of integrating the gyroscope’s rate output to obtain the angle. Realizing a micro rate-integrating gyroscope can be achieved by fabricating hemispherical resonating shells with extremely close frequency matching (delta f < 10 Hz) and a very high quality factor (Q > 1 million). Structures must be highly axisymmetric and micro-finished to nanometer scale roughness. Gyroscope resonators have at least two resonant modes that can be coupled by Coriolis force. Difference in damping coefficients and stiffness of the resonant modes of the MEMS resonator known as anisodamping and anisoelasticity are main sources of error in RIG. Control algorithms should be developed to eliminate these errors.



  • Heidari, A; Chan, M.-L.; Yang, H.-A; Jaramillo, G.; Taheri-Tehrani, P.; Fonda, P.; Najar, H.; Yamazaki, K.; Lin, L.; Horsley, D.A, “Micromachined polycrystalline diamond hemispherical shell resonators,” Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on , vol., no., pp.2415,2418, 16-20 June 2013
    doi: 10.1109/Transducers.2013.6627293
  • P. Fonda, K. Nakamoto, A. Heidari, H.-A. Yang, D. A. Horsley, L. Lin, and K. Yamazaki, “A study on the optimal fabrication method for micro-scale gyroscopes using a hybrid process consisting of electric discharge machining, chemical etching or micro-mechanical milling,” CIRP Annals – Manufacturing Technology, vol. 62, no. 1, pp. 183–186, 2013.
    doi: 10.1016/j.cirp.2013.03.035
  • P. Fonda, M. L. Chan, A. Heidari, K. Nakamoto, S. Sano, D. D. Horsley, and K. Yamazaki, “The Application of Diamond-based Electrodes for Efficient EDMing of Silicon Wafers for Freeform MEMS Device Fabrication,” Procedia CIRP, vol. 6, pp. 280–285, 2013.
    doi: 10.1016/j.procir.2013.03.020
  • H. Najar, A. Heidari, M.-L. Chan, H.-A. Yang, L. Lin, D. G. Cahill, and D. A. Horsley, “Microcrystalline diamond micromechanical resonators with quality factor limited by thermoelastic damping,” Applied Physics Letters, vol. 102, no. 7, p. 071901, Feb. 2013.
    doi: 10.1063/1.4793234

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