Amir Heidari

Postdoctoral Researcher
Email: aheidari AT


Design and Fabrication of Micro Rate Integrated Gyroscope (MRIG)
Materials for High Quality-Factor Resonating Gyroscopes


Amir received his B.Sc. and M.Sc. degrees in Mechanical Engineering from Bu Ali Sina University (BASU) and Iran University of Science and Technology (IUST), Tehran, Iran in 2003 and 2005, respectively. For his Ph.D., he worked on the design and fabrication of single crystal and AlN MEMS based biosensors in Nanyang Technological University, Singapore and Institute of Microelectronics (IME) Singapore. He joined the MEMS Lab research group as a postdoctoral scholar on Feb. 2012.

Area of interest

Design, Fabrication and Characterization of Microelectromechanical Systems (MEMS)
Biosensors (Bio-MEMS)
Piezoelectric Based Resonators (for RF and Biosensing Applications)
MEMS Physical sensors (Microaccelerometers and Microgyroscope)



  • Lu, Y.; Heidari, A.; Horsley, D.A., “A High Fill-Factor Annular Array of High Frequency Piezoelectric Micromachined Ultrasonic Transducers,” Microelectromechanical Systems, Journal of , vol.PP, no.99, pp.1,1
    doi: 10.1109/JMEMS.2014.2358991
  • A. Heidari, M.-L. Chan, H.-A. Yang, G. Jaramillo, P. Taheri-Tehrani, P. Fonda, H. Najar, K. Yamazaki, L. Lin, and D. A. Horsley, “Hemispherical wineglass resonators fabricated from microcrystalline diamond,” J. Micromech. Microeng., vol. 23, no. 12, p. 125016, Dec. 2013.
  • H. Najar, A. Heidari, M.-L. Chan, H.-A. Yang, L. Lin, D. G. Cahill, and D. A. Horsley, “Microcrystalline diamond micromechanical resonators with quality factor limited by thermoelastic damping,” Applied Physics Letters, vol. 102, no. 7, p. 071901, Feb. 2013.
    doi: 10.1063/1.4793234
  • Heidari, A., Y.-J. Yoon , M. I. Lee, L. Khine, M.-K. Park, J. Tsai Ming Lin, A novel checker-patterned AlN MEMS resonator as gravimetric sensor,Journal of Sensors and Actuators A: Physical, 2012.
  • Heidari, A., Y.-J. Yoon, M. K. Park, W. T. Park and J. Tsai Ming Lin, Ultrasensitive Dielectric Filled Lamé-Mode Biomass Sensor, Journal of Sensors and Actuators A: Physical, 2012,
  • Heidari, A., Y.-J. Yoon, Hungsun, S., Choi, H-J., Simulation Based Design of Disk Resonator Based Biosensors under Fabrication Uncertainty,Journl of Mechanical Design, 2012, Volume 134, Issue 4, 041005 (11 pages)
  • Heidari, A., Y.-J. Yoon, W. T. Park and J. Tsai Ming Lin, Developing High Sensitivity Biomass Sensor Using Lamé-Mode Square Resonator,Advanced Materials Research, 2011. 254(46): p. 46-49,
  • Heidari, A., Y.-J. Yoon, P-C Su, H-J Choi, Analysis and Design for a High Performance and Low-cost Biosensor based on the Radial-Contour-mode Disk Resonator, Journal of Microelectronic Engineering, 88(2011), 1730-1732, doi:10.1016/j.mee.2011.01.054.

Conference Papers

  • Saito, Daisuke; Yang, Chen; Heidari, Amir; Najar, Hadi; Lin, Liwei; Horsley, David A., “Batch-fabricated high Q-factor microcrystalline diamond cylindrical resonator,” Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on , vol., no., pp.801,804, 18-22 Jan. 2015
    doi: 10.1109/MEMSYS.2015.7051080
  • Taheri-Tehrani, P., T. Su, A. Heidari, G. Jaramillo, C. Yang, S. Akhbari, H. Najar et al. “Micro-scale diamond hemispherical resonator gyroscope”, Hilton Head 2014 Solid-State Sensors, Actuators & Microsystems Workshop, Hilton Head Island, pp. 289-292. 2014.
  • Yipeng Lu; Heidari, A; Shelton, S.; Guedes, A; Horsley, D.A, “High frequency piezoelectric micromachined ultrasonic transducer array for intravascular ultrasound imaging,” Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on , vol., no., pp.745,748, 26-30 Jan. 2014
    doi: 10.1109/MEMSYS.2014.6765748
  • Heidari, A; Chan, M.-L.; Yang, H.-A; Jaramillo, G.; Taheri-Tehrani, P.; Fonda, P.; Najar, H.; Yamazaki, K.; Lin, L.; Horsley, D.A, “Micromachined polycrystalline diamond hemispherical shell resonators,” Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on, vol., no., pp.2415,2418, 16-20 June 2013
    doi: 10.1109/Transducers.2013.6627293
  • Heidari, A., Y.-J. Yoon, J. Tsai Ming Lin, 2011, Design and simulation of a dielectric field capacitive transducer, Micro-and Nano-Engineering (MNE), Berlin, Germany.
  • Heidari, A., Y.-J. Yoon, W.T. Park and J. Tsai Ming Lin, 2011, Ultrasensitive High Sensitivity Dielectric Filled Lamé-Mode Resonator for Chemical and Biological Applications, Techconnect World, Microtech, Boston, USA.
  • Heidari, A., Y.-J. Yoon, M.K. Park, W.T. Park and J. Tsai Ming Lin, Ultrasensitive Dielectric Filled Lamé-Mode Biomass Sensor in Transducers’ 11, 2011: Beijing, China.
  • L. Khine, J. Tsai Ming, Heidari, A., Y.-J.Yoon, Piezoelectric MEMS Resonant Gas Sensor for Defense Applications, Defense, Science and Research conference (DSR), 2011, Singapore.
  • Heidari, A., Y.-J. Yoon, Woo-Tae Park, Julius Tsai Ming, 2011, Developing High Sensitivity Biomass Sensor Using Lamé-Mode Square Resonator, ICMAT’11, Singapore.
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