Qi Wang

Doctoral Student
Department of Mechanical and Aerospace Engineering
Email: qixwang AT ucdavis.edu


Scandium-doped AlN for MEMS
High Frequency Piezoelectric Micromachined Ultrasound Transducers




Qi studied Mechanical Engineering at the Nanjing University of Aeronautics and Astronautics from where he received a Bachelor of Engineering (BE) in 2011. He then went on to Tohoku University for Master of Engineering (MEng) and complete his thesis on Aluminum Nitride (AlN) deposition in 2013. Qi joined the MEMS Lab in 2014.

Areas of interest

Design and and fabrication of MEMS ultrasound transducers, Aluminum Nitride (AlN)


  • Lu, Yipeng; Wang, Qi; Horsley, David A., “Piezoelectric micromachined ultrasonic transducers with increased coupling coefficient via series transduction,” in Ultrasonics Symposium (IUS), 2015 IEEE International, vol., no., pp.1-4, 21-24 Oct. 2015
    doi: 10.1109/ULTSYM.2015.0093
  • Y. Lu, H. Tang, Q. Wang, S. Fung, J. M. Tsai, M. Daneman, B. E. Boser, and D. A. Horsley, “Waveguide piezoelectric micromachined ultrasonic transducer array for short-range pulse-echo imaging,” Applied Physics Letters, vol. 106, no. 19, p. 193506, May 2015.
    doi: 10.1063/1.4921346
  • Qi Wang; Oguchi, H.; Hara, M.; Kuwano, H., “Investigation of dominant factors to control c-axis tilt angle of aln thin films for efficient energy harvesting,” Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on , vol., no., pp.636,639, 26-30 Jan. 2014
    doi: 10.1109/MEMSYS.2014.6765721
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