Research

EDL-ModeShapes2 - Copy
3-Axis MEMS Gyroscope

  • Soner Sonmezoglu
  • Parsa Taheri
Air couple simulation
Air-Coupled Piezoelectric Micromachined Ultrasound Transducers

  • Yuri Kusano
  • Guo-Lun Luo
DRG Mode Figure 2
Improving Nonlinear Micro-Gyroscope Performance

  • Martial Defoort
DRG SEM
Integrated Microgyroscopes with Improved Scale-Factor and Bias Stability

  • Tsang- Hung (Jason) Su
Lorentz Force Sensor
MEMS Electronic Compass: Three-Axis Magnetometer

  • Soner Sonmezoglu
Diamond HRG
Micro Rate Integrated Gyroscope (MRIG)

  • Parsa Taheri
imaging
Novel Ultrasonic Fingerprint Sensor Based on High-Frequency Piezoelectric Micromachined Ultrasonic Transducers (PMUTs)

  • Joy Jiang
  • Stephanie Fung
  • Qi Wang
  • Hao-Yen Tang (UC Berkeley)
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Scandium-doped AlN for MEMS

  • Yuri Kusano
EDL-ModeShapes2 - Copy
High Fill-factor surface micromachined PMUTs

  • Guo-Lun Luo
  • Yuri Kusano

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