Patents and Book Chapters

  1. D. Horsley, “Method of fabricating suspended microstructures,” US6465355 B1, 15-Oct-2002.
  2. P. G. Hartwell, S. T. Hoen, D. Horsley, C. C. Yang, P. P. Merchant, and C. P. Taussig, “MEMS having a three-wafer structure,” US6930368 B2, 16-Aug-2005.
  3. D. Horsley, R. Conant, and W. Clark, “PWM-based measurement interface for a micro-machined electrostatic actuator,” US6933873 B1, 23-Aug-2005.
  4. B. Behin, R. Conant, M. J. Daneman, D. Horsley, M.-H. Kiang, D. Lerner, and S. Pannu, “Three dimensional optical switches and beam steering modules,” US7023604 B2, 04-Apr-2006.
  5. P. G. Hartwell, D. Horsley, S. T. Hoen, and J. A. Harley, “Methods for dicing wafer stacks to provide access to interior structures,” US7042105 B2, 09-May-2006.

Book Chapters

  1. D. Horsley, “Chapter Seventeen – Optical Measurement of Static and Dynamic Displacement in MEMS,” in Handbook of Silicon Based MEMS Materials and Technologies, V. Lindroos, M. Tilli, A. Lehto, and T. Motooka, Eds. Boston: William Andrew Publishing, 2010, pp. 299–304.
    doi: 10.1016/B978-0-8155-1594-4.00017-6

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