Publications

Publications may also be downloaded/viewed from the BSAC publications database: Here

2017

Conference Proceedings

  1. Wang, Q.; Kusano, Y.; Horsley D.A., “Coupled piezoelectric micromachined ultraosnic transducers with improved pulse-echo performance,” in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), pp.151-154, 22 – 26 Jan, 2017.
  2. Jiang, X.; Tang, H.Y.; Lu, Y.; Ng, E.J.; Tsai, J.M.; Daneman, M.J.; Boser,B.E.; Horsley, D.A., “Inter-Element Coupling Effects in Pulse-Echo Ultrasonic Fingerprint Sensors,” in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), pp.1192-1195, 22 – 26 Jan, 2017.
  3. Kusano, Y.; Wang, Q.; Rudy, R.Q.; Polcawich, R.G.; Horsley, D.A., “Wideband Air-Coupled PZT Piezoelectric Micromachined Ultrasonic Transducer Through DC Bias Tuning,” in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), pp.1204-1207, 22 – 26 Jan, 2017.
  4. Taheri-Tehrani P.; Defoort, M. ; Chen, Y.; Flader, I.; Ng, E.J.; Shin, D.D.; Kenny, T.W.; Horsley, D.A., “Epitaxially-Encapsulated Quad Mass Resonator with Shaped Comb Fingers for Frequency Tuning,” in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), pp.1111-1114, 22 – 26 Jan, 2017.

2016

Journals

  1.  Sonmezoglu, S., Horsley, D.A., “Reducing Offset and Bias Instability in Lorentz Force Magnetic Sensors Through Bias Chopping,” Journal of Microelectromechanical Systems, vol.PP, no.99, pp.1-10, Nov. 2016.
    doi: 10.1109/JMEMS.2016.2626259
  2.  Defoort, M., Taheri-Terhani, P., Horsley, D.A., “Exploiting nonlinear amplitude-frequency dependence for temperature compensation in silicon micromechanical resonators,” Applied Physics Letters, vol. 109, no. 15, p. , Jun. 2015.
    doi: 10.1063/1.4964832
  3. Nitzan, S.,Taheri-Tehrani, P., Defoort, M., Sonmezoglu, S., Horsley, D.A., “Countering the Effects of Nonlinearity in Rate-Integrating Gyroscopes,” IEEE Sensors Journal, vol. 16, no. 10, p.3556-3563 , Feb. 2015.
    doi: 10.1109/JSEN.2016.2533480

Conference Proceedings

  1. Wang, Q.; Lu, Y.; Fung, S.; Jiang, X.; Mishin, S.; Oshmyansky, Y.; Horsley, D.A., “Scandium-Doped Aluminum Nitride-Based Piezoelectric Micromachined Ultrasound Transducers”, in Hilton Head 2016 Solid-State Sensors, Actuators and Microsystems Workshop on, pp. 436 – 439, 5 – 9 June, 2016.
  2. Defoort, M., Taheri-Terhani, P.; Nitzan, S.; Horsley, D.A., “Synchronization in Micromechanical Gyroscopes”, in Hilton Head 2016 Solid-State Sensors, Actuators and Microsystems Workshop on, pp. 84 – 87, 5 – 9 June, 2016.
  3. Taheri-Tehrani P.; Challoner D. A.; Izyumin, O.; Boser, B. E.; Horsley, D. A., “A New Electronic Feedback Compensation Method for Rate Integrating Gyroscopes,” in 2016 IEEE 29th International Symposium on Inertial Sensors and Systems, pp.1-4, 22 – 25 Feb, 2016.
    doi: 10.1109/ISISS.2016.7435532
  4. Taheri-Tehrani, P.; Kline, M.; Izyumin, I.; Eminoglu, B.; Yeh, Y.-C.; Yang, Y.; Chen, Y.; Flader, I.; Ng, E.J.; Kenny, T.W.; Boser, B.E.; Horsley, D.A., “Epitaxially-Encapsulated Quad Mass Gyroscope with Nonlinearity Compesation,” in 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), pp.966-969, 24 – 28 Jan, 2016.
    doi: 10.1109/MEMSYS.2016.7421793
  5. Jiang, X.; Tang, H.Y.; Lu, Y.; Li, X.; Tsai, J.M.; Ng, E.J.; Daneman, M.J.; Lim, M.; Assaderaghi, F.; Boser, B.E.; Horsley, D.A., “Monolithic 591× 438 DPI ultrasonic fingerprint sensor,” in 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), pp.107-110, 24 – 28 Jan, 2016.
    doi: 10.1109/MEMSYS.2016.7421569
  6. Sonmezoglu, S.; Horsley, D.A., “Off-Resonance Operation of a MEMS Lorentz Force Magnetometer with Improved Thermal Stability of the Scale Factor,” in 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), pp.103-106, 24 – 28 Jan, 2016.
    doi: 10.1109/MEMSYS.2016.7421568
  7. Rozen, O.; Block, S.T.; Mo, X.; Bland, W.; Hurst, P.; Tsai, J.M.; Daneman, M.; Amirtharajah, R.; Horsley, D.A., “Monolithic MEMS-CMOS Ultrasonic Rangefinder Based on Dual-Electrode PMUTs,” in 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), pp.115-118, 24 – 28 Jan, 2016.
    doi: 10.1109/MEMSYS.2016.7421571

2015

Journals

  1. Lu, Y.; Tang, H.; Fung, S.; Boser, B.E.; Horsley, D.A., “Pulse-Echo Ultrasound Imaging Using an AlN Piezoelectric Micromachined Ultrasonic Transducer Array With Transmit Beam-Forming,” Journal of Microelectromechanical Systems, vol.25, no.1, pp.179-187, Dec. 2015
    doi: 10.1109/JMEMS.2015.2503336
  2. Najar, H.; Yang, C.; Heidari, A.; Lin. L.; Horsley, D.A., “Quality factor in polycrystalline diamond micromechanical flexural resonators,” Journal of Microelectromechanical Systems, vol.24, no.6, pp.953-956, Oct. 2015
    doi: 10.1109/JMEMS.2015.2478802
  3. Sonmezoglu, S.; Taheri-Tehrani, P.; Valzasina, C.; Falorni, L.G.; Zerbini, S.; Nitzan, S.; Horsley, D.A., “Single-Structure Micromachined Three-Axis Gyroscope With Reduced Drive-Force Coupling,” in Electron Device Letters, IEEE, vol.36, no.9, pp.953-956, Sept. 2015
    doi: 10.1109/LED.2015.2454511
  4. V. Zega, S. Nitzan, M. Li, C. H. Ahn, E. Ng, V. Hong, Y. Yang, T. Kenny, A. Corigliano, and D. A. Horsley, “Predicting the closed-loop stability and oscillation amplitude of nonlinear parametrically amplified oscillators,” Applied Physics Letters, vol. 106, no. 23, p. 233111, Jun. 2015.
  5. Y. Lu, H. Tang, S. Fung, Q. Wang, J. M. Tsai, M. Daneman, B. E. Boser, and D. A. Horsley, “Ultrasonic fingerprint sensor using a piezoelectric micromachined ultrasonic transducer array integrated with complementary metal oxide semiconductor electronics,” Applied Physics Letters, vol. 106, no. 26, p. 263503, Jun. 2015.
    doi: 10.1063/1.4922915
  6. Y. Lu, H. Tang, Q. Wang, S. Fung, J. M. Tsai, M. Daneman, B. E. Boser, and D. A. Horsley, “Waveguide piezoelectric micromachined ultrasonic transducer array for short-range pulse-echo imaging,” Applied Physics Letters, vol. 106, no. 19, p. 193506, May 2015.
    doi: 10.1063/1.4921346
  7. S. H. Nitzan, V. Zega, M. Li, C. H. Ahn, A. Corigliano, T. W. Kenny, and D. A. Horsley, “Self-induced parametric amplification arising from nonlinear elastic coupling in a micromechanical resonating disk gyroscope,” Sci. Rep., vol. 5, Mar. 2015.
    doi: 10.1038/srep09036
  8. S. Sonmezoglu, M. Li, and D. A. Horsley, “Force-rebalanced Lorentz force magnetometer based on a micromachined oscillator,” Applied Physics Letters, vol. 106, no. 9, p. 093504, Mar. 2015.
    doi: 10.1063/1.4914177
  9. Lu, Y.; Horsley, D.A., “Modeling, Fabrication, and Characterization of Piezoelectric Micromachined Ultrasonic Transducer Arrays Based on Cavity SOI Wafers,” Microelectromechanical Systems, Journal of , vol.PP, no.99, pp.1,1, Jan. 2015.
    doi: 10.1109/JMEMS.2014.2387154
  10. Mo Li; Nitzan, S.; Horsley, D.A., “Frequency-Modulated Lorentz Force Magnetometer With Enhanced Sensitivity via Mechanical Amplification,” Electron Device Letters, IEEE , vol.36, no.1, pp.62,64, Jan. 2015.
    doi: 10.1109/LED.2014.2372617

Conference Proceedings

  1. Fung, Stephanie; Lu, Yipeng; Tang, Hao-Yen; Tsai, Julius M.; Daneman, Michael; Boser, Bernhard E.; Horsley, David A., “Theory and experimental analysis of scratch resistant coating for ultrasonic fingerprint sensors,” in Ultrasonics Symposium (IUS), 2015 IEEE International, vol., no., pp.1-4, 21-24 Oct. 2015
    doi: 10.1109/ULTSYM.2015.0150
  2. Lu, Yipeng; Wang, Qi; Horsley, David A., “Piezoelectric micromachined ultrasonic transducers with increased coupling coefficient via series transduction,” in Ultrasonics Symposium (IUS), 2015 IEEE International, vol., no., pp.1-4, 21-24 Oct. 2015
    doi: 10.1109/ULTSYM.2015.0093
  3. Taheri-Tehrani, P.; Izyumin, O.; Izyumin, I.; Ahn, C.H.; Ng, E.J.; Hong, V.A.; Yang, Y.; Kenny, T.W.; Boser, B.E.; Horsley, D.A., “Disk resonator gyroscope with whole-angle mode operation,” in Inertial Sensors and Systems (ISISS), 2015 IEEE International Symposium on , vol., no., pp.1-4, 23-26 March 2015
    doi: 10.1109/ISISS.2015.7102360
  4. Lu, Yipeng; Rozen, Ofer; Tang, Hao-Yen; Smith, Gabriel L.; Fung, Stephanie; Boser, Bernhard E.; Polcawich, Ronald G.; Horsley, David A., “Broadband piezoelectric micromachined ultrasonic transducers based on dual resonance modes,” Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on , vol., no., pp.146,149, 18-22 Jan. 2015
    doi: 10.1109/MEMSYS.2015.7050907
  5. Lu, Yipeng; Tang, Hao-Yen; Fung, Stephanie; Boser, Bernhard E.; Horsley, David A., “Short-range and high-resolution ultrasound imaging using an 8 MHz Aluminum Nitride PMUT array,” Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on , vol., no., pp.140,143, 18-22 Jan. 2015
    doi: 10.1109/MEMSYS.2015.7050905
  6. Saito, Daisuke; Yang, Chen; Heidari, Amir; Najar, Hadi; Lin, Liwei; Horsley, David A., “Batch-fabricated high Q-factor microcrystalline diamond cylindrical resonator,” Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on , vol., no., pp.801,804, 18-22 Jan. 2015
    doi: 10.1109/MEMSYS.2015.7051080
  7. Rozen, Ofer; Block, Scott.T.; Shelton, Stefon E.; Przybyla, Richard J.; Horsley, David A., “Air-coupled aluminum nitride piezoelectric micromachined ultrasonic transducers at 0.3 MHz TO 0.9 MHz,” Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on , vol., no., pp.921,924, 18-22 Jan. 2015
    doi: 10.1109/MEMSYS.2015.7051110

2014

Journals

  1. Lu, Y.; Heidari, A.; Horsley, D.A., “A High Fill-Factor Annular Array of High Frequency Piezoelectric Micromachined Ultrasonic Transducers,” Microelectromechanical Systems, Journal of , vol.PP, no.99, pp.1,1
    doi: 10.1109/JMEMS.2014.2358991
  2. Najar, H.;Chan, M.-L.; Yang, H.-S.; Lin, L.; Cahill, D.G; Horsley, D.A., “High quality factor nanocrystalline diamond micromechanical resonators limited by thermoelastic damping”, Applied Physics Letters, 104, 151903 (2014)
    doi: 10.1063/1.4871803
  3. Su, Tsang-Hung; Nitzan, S.H.; Taheri-Tehrani, P.; Kline, M.H.; Boser, B.E.; Horsley, D.A, “Silicon MEMS Disk Resonator Gyroscope with an Integrated CMOS Analog Front-End,” Sensors Journal, IEEE , vol.PP, no.99, pp.1,1
    doi: 10.1109/JSEN.2014.2335735
  4. Li, M.; Horsley, D.A, “Offset Suppression in a Micromachined Lorentz Force Magnetic Sensor by Current Chopping,” Microelectromechanical Systems, Journal of , vol.PP, no.99, pp.1,1
    doi: 10.1109/JMEMS.2014.2316452
  5. Li, M.; Sonmezoglu, S.; Horsley, D.A, “Extended Bandwidth Lorentz Force Magnetometer Based on Quadrature Frequency Modulation,” Microelectromechanical Systems, Journal of , vol.PP, no.99, pp.1,1
    doi: 10.1109/JMEMS.2014.2330055

Conference Proceedings

  1. Lu, Y., Shelton S.E., and Horsley D.A., “High Frequency and High Fill Factor Piezoelectric Micromachined Ultrasonic Transducers Based on Cavity SOI Wafers”, Hilton Head 2014 Solid-State Sensors, Actuators & Microsystems Workshop, Hilton Head Island
  2. Rozen, O., Shelton S.E., Guedes A., and Horsley D.A., “Variable Thickness Diaphragm for a Stress Insensitive Wideband Piezoelectric Micromachined Ultrasonic Transducer”, Hilton Head 2014 Solid-State Sensors, Actuators & Microsystems Workshop, Hilton Head Island
  3. Taheri-Tehrani, P., T. Su, A. Heidari, G. Jaramillo, C. Yang, S. Akhbari, H. Najar et al. “Micro-scale diamond hemispherical resonator gyroscope”, Hilton Head 2014 Solid-State Sensors, Actuators & Microsystems Workshop, Hilton Head Island, pp. 289-292. 2014.
  4. M. Li, S. Sonmezoglu, E.J. Ng, V.A. Hong, C.H. Ahn, Y. Yang, T.W. Kenny, and D.A. Horsley, “Lorentz force magnetometer with quadrature frequency modulation,” Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2014, pp. 52-55, Jun 2014.
  5. Li, M.; Rouf, V.T.; Sonmezoglu, S.; Horsley, D.A, “Magnetic sensors based on micromechanical oscillators,” Frequency Control Symposium (FCS), 2014 IEEE International , vol., no., pp.1,3, 19-22 May 2014
    doi: 10.1109/FCS.2014.6859914
  6. Najar, H.; Thron, A; Yang, C.; Fung, S.; van Benthem, K.; Lin, L.; Horsley, D.A, “Increased thermal conductivity polycrystalline diamond for low-dissipation micromechanical resonators,” Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on , vol., no., pp.628,631, 26-30 Jan. 2014
    doi: 10.1109/MEMSYS.2014.6765719
  7. Nitzan, S.; Su, T.-H.; Ahn, C.; Ng, E.; Hong, V.; Yang, Y.; Kenny, T.; Horsley, D.A, “Impact of gyroscope operation above the critical bifurcation threshold on scale factor and bias instability,” Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on , vol., no., pp.749,752, 26-30 Jan. 2014
    doi: 10.1109/MEMSYS.2014.6765749
  8. Yipeng Lu; Heidari, A; Shelton, S.; Guedes, A; Horsley, D.A, “High frequency piezoelectric micromachined ultrasonic transducer array for intravascular ultrasound imaging,” Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on , vol., no., pp.745,748, 26-30 Jan. 2014
    doi: 10.1109/MEMSYS.2014.6765748
  9. Li, M.; Ng, E.J.; Hong, V.A.; Ahn, C.H.;Yang Y.; Kenny, T.W.; Horsley, D.A., “Single-structure 3-axis lorentz force magnetometer with sub-30 nT/√HZ resolution,” Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on , vol., no., pp.80,83, 26-30 Jan. 2014
  10. Shelton S.E.,Rozen, O., Guedes A., Przybyla, R., Boser, B., Horsley, D. A., “Improved acoustic coupling of air-coupled micromachined ultrasonic transducers”, Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference
    doi: 10.1109/MEMSYS.2014.6765750
  11. Mo Li; Ng, E.J.; Hong, V.A; Ahn, C.H.; Yushi Yang; Kenny, T.W.; Horsley, D.A, “Single-structure 3-axis lorentz force magnetometer with sub-30 nT/√HZ resolution,” Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on , vol., no., pp.80,83, 26-30 Jan. 2014
    doi: 10.1109/MEMSYS.2014.6765578

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